Imaging / Analysis

sem          

SEM / EDX system

 

alicona

Optical 3D surface metrology system 

 

 hitachi sem

SEM system

 

microscope

Metallurgical microscope

 

 

Micro-/Nano-Fabrication Process

mask maker

Emulsion mask maker

 

mask aligner

Mask aligner

 

 Xe F2   

XeF2 Etching system

 spincoater

Spin coater

 

 vacum oven

Vacuum oven

 
   

Heat Treatment

 furnace

Vacuum furnace

 tube furnace

Tube furnace